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NEC Minitandem Ion Accelerator

eagle-i ID


Resource Type

  1. Ion source


  1. Resource Description
    "Thin film characterization is carried out in the Nanotech Facility's Ion Scattering Laboratory. At the heart of this laboratory is an NEC 5SDH 1.7MV Pelletron Accelerator, which is capable of producing ion beams ranging from 0.2-5.1 MeV. The laboratory maintains three beam lines: (1) A General Purpose Station for Rutherford Backscattering, Particle Induced X-ray Emission and Forward Recoil Spectrometry, (2) a High Resolution Surface Structure Analysis Station with in situ heating and deposition, ion sputtering, a photoemission system, RBS, AES and LEED, and (3) and a Time-of-flight Molecular Beam Epitaxy station. A computer-controlled goniometer aids in the collection of channel maps for crystal structure orientation studies and ion implantation applications."
  2. Manufacturer
    NEC Corporation
  3. Website(s)
  4. Related Technique
    Material surface analysis
  5. Location
    Nanoscale Characterization
Provenance Metadata About This Resource Record
  1. workflow state
  2. contributor
    ggrant (Gregory Grant)
  3. created
  4. creator
  5. modified
Copyright © 2016 by the President and Fellows of Harvard College
The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016