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Denton Explorer 14

eagle-i ID

http://eagle-i.itmat.upenn.edu/i/00000152-31df-d57e-aeee-612f80000000

Resource Type

  1. Thermal evaporator

Properties

  1. Resource Description
    Open load system in sputter-down configuration Two DC guns Able to co-sputter one DC and one RF source One RF gun Cryo pumped with automated interface Automated control of film thickness Pieces through 150mm wafers Wafer platen rotation with cooling Substrate cleaning <img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/Denton-Explorer-225x300.jpg" alt="Denton Explorer 14">
  2. Manufacturer
    Denton Vacuum, LLC
  3. Model Number
    Explorer 14
  4. Website(s)
    http://www.nano.upenn.edu/resources/equipmentinstrumentation/
  5. Part of Collection
    Quattrone Nanofabrication Facility
  6. Location
    Singh Center for Nanotechnology (Penn)
 
RDFRDF
 
Provenance Metadata About This Resource Record
  1. workflow state
    Published
  2. contributor
    tjohnson (Tenille Johnson)
  3. created
    2016-01-11T13:15:09.947-05:00
  4. creator
    fcoldren
  5. modified
    2016-09-12T17:17:30.494-04:00

Copyright © 2016 by the President and Fellows of Harvard College
The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016