E-Beam Thermal Evaporator – Lesker PVD 75 1

eagle-i ID

Resource Type

Properties

1. Resource Description

   Two thermal sources Four pocket e-beam at 10kV Cryo pumped with automated interface Automated control of film thickness Pieces through 150mm wafers Wafer platen rotation with cooling stage <img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/E-Beam-Thermal-Evaporator-225x300.jpg" alt="E-Beam Thermal Evaporator – Lesker PVD 75 1">

2. Manufacturer

   Kurt J. Lesker Company

3. Model Number

   PVD 75

4. Website(s)

   http://www.nano.upenn.edu/resources/equipmentinstrumentation/

5. Part of Collection

   Quattrone Nanofabrication Facility

6. Location

   Singh Center for Nanotechnology (Penn)