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E-Beam Thermal Evaporator – Lesker PVD 75 1
eagle-i ID
http://eagle-i.itmat.upenn.edu/i/00000152-31f1-8887-aeee-612f80000000
Resource Type
Properties
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Resource Description
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Two thermal sources
Four pocket e-beam at 10kV
Cryo pumped with automated interface
Automated control of film thickness
Pieces through 150mm wafers
Wafer platen rotation with cooling stage
<img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/E-Beam-Thermal-Evaporator-225x300.jpg" alt="E-Beam Thermal Evaporator – Lesker PVD 75 1">
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Manufacturer
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Kurt J. Lesker Company
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Model Number
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PVD 75
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Website(s)
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http://www.nano.upenn.edu/resources/equipmentinstrumentation/
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Part of Collection
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Quattrone Nanofabrication Facility
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Location
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Singh Center for Nanotechnology (Penn)
