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Lesker PVD 75 3

eagle-i ID

http://eagle-i.itmat.upenn.edu/i/00000152-3203-4b1e-aeee-612f80000000

Resource Type

  1. Thermal evaporator

Properties

  1. Resource Description
    Load locked system Three DC guns Able to co-sputter two DC sources One RF gun Cryo pumped with automated interface Automated control of film thickness Pieces through 150mm wafers Wafer platen rotation with heating <img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/Lesker-PVD-75-3-225x300.jpg" alt="Lesker PVD 75 3">
  2. Manufacturer
    Kurt J. Lesker Company
  3. Model Number
    PVD 75
  4. Website(s)
    http://www.nano.upenn.edu/resources/equipmentinstrumentation/
  5. Part of Collection
    Quattrone Nanofabrication Facility
  6. Location
    Singh Center for Nanotechnology (Penn)
 
RDFRDF
 
Inferred Types from the eagle-i Ontology (What is an ontology?)
Provenance Metadata About This Resource Record
  1. workflow state
    Published
  2. contributor
    fcoldren
  3. created
    2016-01-11T13:47:56.633-05:00
  4. creator
    fcoldren
  5. modified
    2016-01-12T09:10:12.643-05:00
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