See it in Search
This page is a preview of the following resource. Continue onto eagle-i search using the button on the right to see the full record.
Lesker PVD 75 3
eagle-i ID
http://eagle-i.itmat.upenn.edu/i/00000152-3203-4b1e-aeee-612f80000000
Resource Type
Properties
-
-
Resource Description
-
Load locked system
Three DC guns
Able to co-sputter two DC sources
One RF gun
Cryo pumped with automated interface
Automated control of film thickness
Pieces through 150mm wafers
Wafer platen rotation with heating
<img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/Lesker-PVD-75-3-225x300.jpg" alt="Lesker PVD 75 3">
-
-
Manufacturer
-
Kurt J. Lesker Company
-
-
Model Number
-
PVD 75
-
-
Website(s)
-
http://www.nano.upenn.edu/resources/equipmentinstrumentation/
-
-
Part of Collection
-
Quattrone Nanofabrication Facility
-
-
Location
-
Singh Center for Nanotechnology (Penn)
