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Anatech SCE 106
eagle-i ID
http://eagle-i.itmat.upenn.edu/i/00000152-320d-83d8-aeee-612f80000000
Resource Type
Properties
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Resource Description
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Anatech USA’s SCE-100 Series Inductively Coupled (ICP) Plasma systems are extremely effective for a Plasma Ashing process to activate a surface prior to bonding PDMS, e.g.
Process gases is O2. Sample sizes are pieces to 100mm round wafers.
<img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/DE-01-225x300.jpg" alt="Anatech SCE 106">
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Manufacturer
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Anatech USA
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Model Number
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SCE 106
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Website(s)
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http://www.nano.upenn.edu/resources/equipmentinstrumentation/
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Part of Collection
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Quattrone Nanofabrication Facility
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Location
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Singh Center for Nanotechnology (Penn)
