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E-Beam Resist Hot Plate Tower

eagle-i ID

http://eagle-i.itmat.upenn.edu/i/00000152-3242-6ba7-aeee-612f80000000

Resource Type

  1. Hot plate

Properties

  1. Resource Description
    Each hot plate tower in QNF is outfitted with (6) Torrey Pines digital thermal hot plates that can be heated to 350C with controlled ramping. In addition, there is a stainless steel gravity convection capable of heating to 300C in each tower as well. <img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/HPT-01v2-225x300.jpg" alt="E-Beam Resist Hot Plate Tower">
  2. Additional Name
    Bake 1
  3. Manufacturer
    Torrey Pines Scientific, Inc.
  4. Website(s)
    http://www.nano.upenn.edu/resources/equipmentinstrumentation/
  5. Part of Collection
    Quattrone Nanofabrication Facility
  6. Location
    Singh Center for Nanotechnology (Penn)
 
RDFRDF
 
Provenance Metadata About This Resource Record
  1. workflow state
    Published
  2. contributor
    fcoldren
  3. created
    2016-01-11T14:57:57.504-05:00
  4. creator
    fcoldren
  5. modified
    2016-01-12T09:11:44.971-05:00

Copyright © 2016 by the President and Fellows of Harvard College
The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016