eagle-i The University of PennsylvaniaThe University of Pennsylvania
See it in Search
This page is a preview of the following resource. Continue onto eagle-i search using the button on the right to see the full record.

Elionix ELS-7500EX

eagle-i ID

http://eagle-i.itmat.upenn.edu/i/00000152-324a-c336-aeee-612f80000000

Resource Type

  1. Electron beam lithography system

Properties

  1. Resource Description
    Ultra-high precision lithography with a resolution of 10 nm and with high stitching and overlay accuracy. Specifications Electron gun emitter ZrO/W thermal field emitter Acceleration voltage 50kV,30kV,20kV Minimum line width 10nm Specimen size 6″ (maximum) Features Ultra-fine lithography. The 2-nm diameter spot beam allows the ultra fine pattern writing of 10 nm width. ELS-7500EX incorporates SEM function that serves for exposed pattern observation. High stitching and overlay accuracy. ELS-7500EX provides overlay accuracy of 30 nm that supports mix-and-match with photolithography. The recipe function, with saved optimum beam settings, provides the ease of the operation. The stage with a built-in laser interferometer and beam positioning resolution of 0.31 nm with an 18-bit DAC provide a stitching accuracy of 30 nm. High performance with compact configuration. Ease of operation with PC control. Integration of a Windows compatible GUI and CAD realizes a small footprint. Electron optical condition control and CAD pattern design can be accomplished by simply using a mouse. A very user friendly system. <img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/EBL-01v2-225x300.jpg" alt="Elionix ELS-7500EX">
  2. Manufacturer
    Elionix Inc.
  3. Model Number
    ELS-7500EX
  4. Website(s)
    http://www.nano.upenn.edu/resources/equipmentinstrumentation/
  5. Part of Collection
    Quattrone Nanofabrication Facility
  6. Location
    Singh Center for Nanotechnology (Penn)
 
RDFRDF
 
Provenance Metadata About This Resource Record
  1. workflow state
    Published
  2. contributor
    fcoldren
  3. created
    2016-01-11T15:06:08.115-05:00
  4. creator
    fcoldren
  5. modified
    2016-01-12T09:11:49.878-05:00

Copyright © 2016 by the President and Fellows of Harvard College
The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016