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Electron Beam Lithography Spinner
eagle-i ID
http://eagle-i.itmat.upenn.edu/i/00000152-326e-6296-aeee-612f80000000
Resource Type
Properties
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Resource Description
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Maximum speed of 10,000 rpm
User friendly programmable interface
Programmable step functions (up to 10 steps per recipe)
Programmable process control
Wafer sizes from pieces through 150mm
<img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/SPN-01v2-300x225.jpg" alt="Electron Beam Lithography Spinner">
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Additional Name
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Spin 1
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Website(s)
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http://www.nano.upenn.edu/resources/equipmentinstrumentation/
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Part of Collection
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Quattrone Nanofabrication Facility
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Location
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Singh Center for Nanotechnology (Penn)
The University of Pennsylvania
