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Electron Beam Lithography Spinner

eagle-i ID

http://eagle-i.itmat.upenn.edu/i/00000152-326e-6296-aeee-612f80000000

Resource Type

  1. Spin coater

Properties

  1. Resource Description
    Maximum speed of 10,000 rpm User friendly programmable interface Programmable step functions (up to 10 steps per recipe) Programmable process control Wafer sizes from pieces through 150mm <img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/SPN-01v2-300x225.jpg" alt="Electron Beam Lithography Spinner">
  2. Additional Name
    Spin 1
  3. Website(s)
    http://www.nano.upenn.edu/resources/equipmentinstrumentation/
  4. Part of Collection
    Quattrone Nanofabrication Facility
  5. Location
    Singh Center for Nanotechnology (Penn)
 
RDFRDF
 
Inferred Types from the eagle-i Ontology (What is an ontology?)
Provenance Metadata About This Resource Record
  1. workflow state
    Published
  2. contributor
    fcoldren
  3. created
    2016-01-11T15:44:53.327-05:00
  4. creator
    fcoldren
  5. modified
    2016-01-12T09:11:46.268-05:00
Copyright © 2016 by the President and Fellows of Harvard College
The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016