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KLA 2D Profilometer

eagle-i ID

http://eagle-i.itmat.upenn.edu/i/00000152-3292-d421-aeee-612f80000000

Resource Type

  1. Profilometer

Properties

  1. Resource Description
    The P-7 stylus profiler offers industry leading measurement repeatability for reliable measurement performance. The surface measurement system has 150 mm scan length standard – the only stylus profiler on the market to offer long scan capability without the need for stitching. The UltraLite® sensor includes dynamic force control, excellent linearity, and the highest vertical resolution making it the best sensor available on a surface measurement system. Finally, this stylus profiler’s surface measurement system includes point-and-click operation and the productivity package to offer the easiest to use tool on the market with the features required by university, R&D, and production environments. The P-7 Stylus profiler is capable of addressing a wide range of surface measurements and applications: Thin film step height measurements Thick film step height measurements Photo resist / soft films Etched trench depth <img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/MET-01v2-225x300.jpg" alt="KLA 2D Profilometer">
  2. Additional Name
    KLA Tencor P7 1 Profilometer
  3. Manufacturer
    KLA-Tencor Corporation
  4. Model Number
    P-7
  5. Website(s)
    http://www.nano.upenn.edu/resources/equipmentinstrumentation/
  6. Part of Collection
    Quattrone Nanofabrication Facility
  7. Location
    Singh Center for Nanotechnology (Penn)
 
RDFRDF
 
Provenance Metadata About This Resource Record
  1. workflow state
    Published
  2. contributor
    fcoldren
  3. created
    2016-01-11T16:25:26.161-05:00
  4. creator
    fcoldren
  5. modified
    2016-01-12T09:12:04.492-05:00

Copyright © 2016 by the President and Fellows of Harvard College
The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016