KLA 3D Profilometer

eagle-i ID

Resource Type

Properties

1. Resource Description

   The P-7 stylus profiler offers industry leading measurement repeatability for reliable measurement performance. The surface measurement system has 150 mm scan length standard – the only stylus profiler on the market to offer long scan capability without the need for stitching. The UltraLite® sensor includes dynamic force control, excellent linearity, and the highest vertical resolution making it the best sensor available on a surface measurement system. Finally, this stylus profiler’s surface measurement system includes point-and-click operation and the productivity package to offer the easiest to use tool on the market with the features required by university, R&D, and production environments. The P-7 Stylus profiler is capable of addressing a wide range of surface measurements and applications: Thin film step height measurements Thick film step height measurements Photo resist / soft films Etched trench depth Materials characterization for surface roughness and waviness Surface curvature and form 2D stress of thin films Dimensional analysis and surface texture 3D imaging of various surfaces Flatness or curvature Defect review and defect analysis <img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/MET-02-300x225.jpg" alt="KLA 3D Profilometer">

2. Additional Name

   KLA Tencor P7 2 Profilometer

3. Manufacturer

   KLA-Tencor Corporation

4. Model Number

   P-7

5. Website(s)

   http://www.nano.upenn.edu/resources/equipmentinstrumentation/

6. Part of Collection

   Quattrone Nanofabrication Facility

7. Location

   Singh Center for Nanotechnology (Penn)