Rudolph Auto Ellipsometer VIS/NIR

eagle-i ID

Resource Type

Properties

1. Resource Description

   This unit is Multi-Wavelength Ellipsometer with direct readout of thickness and refractive index of single and multi-layer films. The NIR-3 optics allows user to select 405nm, 633nm and 830nm. The longer wavelength option is ideal for plasma deposited films so they are rendered transparent. Substrates up to 150mm Wavelengths: 532, 633 and 808nm <img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/MET-07-300x225.jpg" alt="Rudolph Auto Ellipsometer VIS/NIR">

2. Additional Name

   Rudolph

3. Manufacturer

   Rudolph Technologies, Inc.

4. Website(s)

   http://www.nano.upenn.edu/resources/equipmentinstrumentation/

5. Part of Collection

   Quattrone Nanofabrication Facility

6. Location

   Singh Center for Nanotechnology (Penn)