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Rudolph Auto Ellipsometer VIS/NIR
eagle-i ID
http://eagle-i.itmat.upenn.edu/i/00000152-3295-6ac6-aeee-612f80000000
Resource Type
Properties
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Resource Description
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This unit is Multi-Wavelength Ellipsometer with direct readout of thickness and refractive index of single and multi-layer films. The NIR-3 optics allows user to select 405nm, 633nm and 830nm. The longer wavelength option is ideal for plasma deposited films so they are rendered transparent.
Substrates up to 150mm
Wavelengths: 532, 633 and 808nm
<img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/MET-07-300x225.jpg" alt="Rudolph Auto Ellipsometer VIS/NIR">
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Additional Name
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Rudolph
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Manufacturer
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Rudolph Technologies, Inc.
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Website(s)
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http://www.nano.upenn.edu/resources/equipmentinstrumentation/
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Part of Collection
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Quattrone Nanofabrication Facility
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Location
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Singh Center for Nanotechnology (Penn)
