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Rudolph Auto Ellipsometer VIS/NIR

eagle-i ID

http://eagle-i.itmat.upenn.edu/i/00000152-3295-6ac6-aeee-612f80000000

Resource Type

  1. Ellipsometer

Properties

  1. Resource Description
    This unit is Multi-Wavelength Ellipsometer with direct readout of thickness and refractive index of single and multi-layer films. The NIR-3 optics allows user to select 405nm, 633nm and 830nm. The longer wavelength option is ideal for plasma deposited films so they are rendered transparent. Substrates up to 150mm Wavelengths: 532, 633 and 808nm <img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/MET-07-300x225.jpg" alt="Rudolph Auto Ellipsometer VIS/NIR">
  2. Additional Name
    Rudolph
  3. Manufacturer
    Rudolph Technologies, Inc.
  4. Website(s)
    http://www.nano.upenn.edu/resources/equipmentinstrumentation/
  5. Part of Collection
    Quattrone Nanofabrication Facility
  6. Location
    Singh Center for Nanotechnology (Penn)
 
RDFRDF
 
Provenance Metadata About This Resource Record
  1. workflow state
    Published
  2. contributor
    fcoldren
  3. created
    2016-01-11T16:28:42.088-05:00
  4. creator
    fcoldren
  5. modified
    2016-01-12T09:10:27.429-05:00

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The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016