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HF Process Bench
eagle-i ID
http://eagle-i.itmat.upenn.edu/i/00000152-32a2-262a-aeee-612f80000000
Resource Type
Properties
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Resource Description
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Substrates up to 150mm
5:1 BOE tank (room temperature)
Cascade rinse tank
Goose neck sink
N2 and DI water guns
<img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/WB-06v2-225x300.jpg" alt="HF Process Bench">
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Additional Name
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Bench 6
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Website(s)
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http://www.nano.upenn.edu/resources/equipmentinstrumentation/
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Part of Collection
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Quattrone Nanofabrication Facility
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Location
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Singh Center for Nanotechnology (Penn)
