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HF Process Bench

eagle-i ID

http://eagle-i.itmat.upenn.edu/i/00000152-32a2-262a-aeee-612f80000000

Resource Type

  1. Wet chemical bench

Properties

  1. Resource Description
    Substrates up to 150mm 5:1 BOE tank (room temperature) Cascade rinse tank Goose neck sink N2 and DI water guns <img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/WB-06v2-225x300.jpg" alt="HF Process Bench">
  2. Additional Name
    Bench 6
  3. Website(s)
    http://www.nano.upenn.edu/resources/equipmentinstrumentation/
  4. Part of Collection
    Quattrone Nanofabrication Facility
  5. Location
    Singh Center for Nanotechnology (Penn)
 
RDFRDF
 
Inferred Types from the eagle-i Ontology (What is an ontology?)
Provenance Metadata About This Resource Record
  1. workflow state
    Published
  2. contributor
    fcoldren
  3. created
    2016-01-11T16:41:30.498-05:00
  4. creator
    fcoldren
  5. modified
    2016-01-12T09:11:56.019-05:00
Copyright © 2016 by the President and Fellows of Harvard College
The eagle-i Consortium is supported by NIH Grant #5U24RR029825-02 / Copyright 2016