HF Process Bench

eagle-i ID

Resource Type

Properties

1. Resource Description

   Substrates up to 150mm 5:1 BOE tank (room temperature) Cascade rinse tank Goose neck sink N2 and DI water guns <img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/WB-06v2-225x300.jpg" alt="HF Process Bench">

2. Additional Name

   Bench 6

3. Website(s)

   http://www.nano.upenn.edu/resources/equipmentinstrumentation/

4. Part of Collection

   Quattrone Nanofabrication Facility

5. Location

   Singh Center for Nanotechnology (Penn)