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Verteq Superclean Spin Rinse Dryer

eagle-i ID

http://eagle-i.itmat.upenn.edu/i/00000152-32a8-aa86-aeee-612f80000000

Resource Type

  1. Spin rinse dryer

Properties

  1. Resource Description
    The SuperClean 1600-3 is a single cassette, front-loading, programmable rinser/dryer used to rinse and dry round substrates that are 100mm or 150mm in diameter. The system rinses to a DI water resistivity of ~12 Mohm before the heated nitrogen drying cycle commences. <img src="http://www.nano.upenn.edu/wp-content/uploads/2014/09/SRD-01v2-225x300.jpg" alt="Verteq Superclean Spin Rinse Dryer">
  2. Manufacturer
    Marteq Process Soutions, Inc.
  3. Model Number
    1600-3
  4. Website(s)
    http://www.nano.upenn.edu/resources/equipmentinstrumentation/
  5. Part of Collection
    Quattrone Nanofabrication Facility
  6. Location
    Singh Center for Nanotechnology (Penn)
 
RDFRDF
 
Provenance Metadata About This Resource Record
  1. workflow state
    Published
  2. contributor
    fcoldren
  3. created
    2016-01-11T16:49:46.661-05:00
  4. creator
    fcoldren
  5. modified
    2016-01-12T09:11:12.817-05:00

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